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Reactive Ion Etching
Tuning Metasurface Dimensions by Soft Nanoimprint Lithography and Reactive Ion Etching
Metasurfaces are ultrathin and flat layers of subwavelength nanostructures composed of metallic or high-refractive-index materials. They can alter lightwave properties effectively and show significant application potenti…
Xinyi Cao
,
Yibo Xiao
,
Qiao Dong
,
Shaobo Zhang
,
Junzhuan Wang
,
Lianhui Wang
,
高丽
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