Nanoimprint Lithography

All dissolvable and transient plasmonic device enabled by nanoimprint lithography
Abstract Dissolvable and transient devices are important for environment-friendly disposal and information security. Similar to transient electronic devices, photonic devices use dissolvable metals such as magnesium and …
PDF 引用 DOI
Large-area silicon photonic crystal supporting bound states in the continuum and optical sensing formed by nanoimprint lithography
Optical bound states in the continuum (BIC) are found in various dielectric, plasmonic and hybrid photonic systems. The localized BIC modes and quasi-BIC resonances can result in a large near-field enhancement and a high…
PDF 引用 DOI
Tuning Metasurface Dimensions by Soft Nanoimprint Lithography and Reactive Ion Etching
Metasurfaces are ultrathin and flat layers of subwavelength nanostructures composed of metallic or high-refractive-index materials. They can alter lightwave properties effectively and show significant application potenti…
PDF 引用 DOI